Multicomponent magnetic alloy targets were ablated in vacuum with a XeCl excimer laser at three different fluences. The ablated material was collected onto unheated silicon substrates placed at different angles with respect to the target normal at the incident laser spot. Film composition was inferred by Rutherford backscattering spectrometry analyses. Experimental results reveal that the lighter element concentration is larger in films deposited at higher collecting angle.
Transfer of stoichiometry during pulsed laser ablation of multicomponent magnetic targets
D'ANNA, Emilia;DE GIORGI, Maria Luisa;LUCHES, Armando;
2005-01-01
Abstract
Multicomponent magnetic alloy targets were ablated in vacuum with a XeCl excimer laser at three different fluences. The ablated material was collected onto unheated silicon substrates placed at different angles with respect to the target normal at the incident laser spot. Film composition was inferred by Rutherford backscattering spectrometry analyses. Experimental results reveal that the lighter element concentration is larger in films deposited at higher collecting angle.File in questo prodotto:
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