In this work, we report about the synthesis of silver–titanium dioxide nanostructures and their usage for building up thin films. We shows that nanoparticles of titania enveloped by very thin silver layer were obtained. In addition, these particles were suitable to obtain an active layer for solid-state gas sensor. In particular, we investigate the electrical modifications following the exposure to reactive gases of obtained films. In this way, the sensing performances of active layers were evaluated. The whole sensing characterization was carried out on thin films deposited on alumina and completely processed by microelectronic standard procedures.
Assembly of hybrid silver-titania thin films for gas sensors
SERRA, Antonio;FILIPPO, Emanuela;BUCCOLIERI, ALESSANDRO;MANNO, Daniela Erminia
2010-01-01
Abstract
In this work, we report about the synthesis of silver–titanium dioxide nanostructures and their usage for building up thin films. We shows that nanoparticles of titania enveloped by very thin silver layer were obtained. In addition, these particles were suitable to obtain an active layer for solid-state gas sensor. In particular, we investigate the electrical modifications following the exposure to reactive gases of obtained films. In this way, the sensing performances of active layers were evaluated. The whole sensing characterization was carried out on thin films deposited on alumina and completely processed by microelectronic standard procedures.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
