Novel flexible triboelectric nanogenerator based on metallized porous PDMS and Parylene C

Triboelectric nanogenerators (TENGs) have recently become a powerful technology for energy harvesting and self-powered sensor networks. One of their main advantages is the possibility to employ a wide range of materials, especially for fabricating inexpensive and easy-to-use devices. This paper reports the fabrication and preliminary characterization of a novel flexible triboelectric nanogenerator which could be employed for driving future low power consumption wearable devices. The proposed TENG is a single-electrode device operating in contact-separation mode for applications in low-frequency energy harvesting from intermittent tapping loads involving the human body, such as finger or hand tapping. The novelty of the device lies in the choice of materials: It is based on a combination of a polysiloxane elastomer and a poly (para-xylylene). In particular, the TENG is composed, sequentially, of a poly (dimethylsiloxane) (PDMS) substrate which was made porous and rough with a steam-curing step; then, a metallization layer with titanium and gold, deposited on the PDMS surface with an optimal substrate-electrode adhesion. Finally, the metallized structure was coated with a thin film of parylene C serving as friction layer. This material provides excellent conformability and high charge-retaining capability, playing a crucial role in the triboelectric process; it also makes the device suitable for employment in harsh, wet environments owing to its inertness and barrier properties. Preliminary performance tests were conducted by measuring the open-circuit voltage and power density under finger tapping (∼2 N) at ∼5 Hz. The device exhibited a peak-to-peak voltage of 1.6 V and power density peak of 2.24 mW/m2 at ∼0.4 MW. The proposed TENG demonstrated ease of process, simplicity, cost-effectiveness, and flexibility.